D. Dragoman, A. Dinescu, R. Muller, C. Kusko, A. Herghelegiu, M. Kusko
{"title":"PMMA photonic crystals for waveguiding applications","authors":"D. Dragoman, A. Dinescu, R. Muller, C. Kusko, A. Herghelegiu, M. Kusko","doi":"10.1109/SMICND.2008.4703333","DOIUrl":null,"url":null,"abstract":"This paper describes the fabrication of two- dimensional photonic crystals (PCs) obtained by direct patterning of positive PMMA electronoresist, using the electron-beam lithography technique (EBL). We design, fabricate and simulate a passive optical structure: a channel PC waveguide, to be used in integrated optic applications. The fabrication of the device is a challenge because we integrated the PC waveguide configuration with a taper optical waveguide on the same substrate. The finite difference time domain (FDTD) simulations were used to predict the optical behavior, and in particular the band gap, of the investigated structure.","PeriodicalId":6406,"journal":{"name":"2008 IEEE International Conference on Semiconductor Electronics","volume":"32 1","pages":"85-88"},"PeriodicalIF":0.0000,"publicationDate":"2008-12-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE International Conference on Semiconductor Electronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2008.4703333","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This paper describes the fabrication of two- dimensional photonic crystals (PCs) obtained by direct patterning of positive PMMA electronoresist, using the electron-beam lithography technique (EBL). We design, fabricate and simulate a passive optical structure: a channel PC waveguide, to be used in integrated optic applications. The fabrication of the device is a challenge because we integrated the PC waveguide configuration with a taper optical waveguide on the same substrate. The finite difference time domain (FDTD) simulations were used to predict the optical behavior, and in particular the band gap, of the investigated structure.