High emissive contrast of patterned tungsten-doped VO2 thin film composites

G. Hunt, J. Miragliotta, L. Oh, J. Ginn, A. Warren, D. Shrekenhamer
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Abstract

Thermal regulation is essential for numerous applications across multiple industries such as the efficient temperature control of indoor facilities and the reliable operation of many electronic systems. Vanadium dioxide (VO2) is a phase change material that is well-suited for thermal regulation as a result of its ultrafast, reversible, solid-state transition at 68°C that produces a significant contrast in its infrared (IR) emissive properties. To meet application demands, VO2’s transition temperature can be tuned via doping with a reduction in temperature of ~22 °C per atomic percent tungsten (at. % W6+). However, historically this decrease in the transition temperature has coincided with a reduction in IR optical contrast between the two phases. In this investigation, we demonstrate that by patterning VO2 thin film composites with preoptimized thicknesses, a thermal regulation system with a tunable transition temperature and no significant degradation of contrast between the states is produced. Through carefully selected user-defined patterning of the undoped VO2 layer within the multilayer film, a 64% operating optical contrast was achieved across the 8 – 13 μm spectral region as compared to 42% in the as-deposited film. Additionally, at a doping level of 1.7%, the transition temperature in a VO2 thin film composite with micron-scaled patterning was reduced to 25°C while maintaining 58% emissive contrast in the 8 – 13 μm spectral region.
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图案化掺杂钨氧化钨薄膜复合材料的高发射对比度
热调节对于多个行业的众多应用至关重要,例如室内设施的有效温度控制和许多电子系统的可靠运行。二氧化钒(VO2)是一种相变材料,非常适合热调节,因为它在68°C下具有超快,可逆的固态转变,其红外(IR)发射特性具有显着的对比。为了满足应用需求,VO2的转变温度可以通过掺杂来调整,每原子百分比钨(at)的温度降低~22°C。%将+)。然而,从历史上看,这种转变温度的降低与两相之间红外光学对比度的降低相一致。在这项研究中,我们证明了通过预先优化厚度的VO2薄膜复合材料的图像化,产生了一个具有可调转变温度且状态之间对比度没有明显退化的热调节系统。通过精心选择多层膜内未掺杂的VO2层的自定义图型,在8 - 13 μm光谱区域内实现了64%的工作光学对比度,而在沉积膜中为42%。此外,当掺杂量为1.7%时,具有微米尺度图案的VO2薄膜复合材料的转变温度降至25℃,同时在8 ~ 13 μm光谱区域保持58%的发射对比度。
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