{"title":"Subwavelength prestressed microcantilevers based metamaterials for efficient manipulation of terahertz waves","authors":"Prakash Pitchappa, C. Ho, Chengkuo Lee","doi":"10.1109/IMWS-AMP.2015.7324981","DOIUrl":null,"url":null,"abstract":"We report an array of prestressed MEMS cantilever as active metamaterial for dynamic manipulation of terahertz waves. The electrostatically actuated microcantilevers integrated into split ring resonator and electrical split ring resonator unit cell, further enables active tuning of magnetic and electrical resonance, respectively. The actuation method of these bimaterial cantilevers is expanded using electrothermal and fluid flow methods. The simple MEMS microcantilevers is highly versatile with attractive electro-optic response and forms a technology platform for numerous terahertz applications in the future.","PeriodicalId":6625,"journal":{"name":"2015 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)","volume":"1 1","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2015-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMWS-AMP.2015.7324981","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We report an array of prestressed MEMS cantilever as active metamaterial for dynamic manipulation of terahertz waves. The electrostatically actuated microcantilevers integrated into split ring resonator and electrical split ring resonator unit cell, further enables active tuning of magnetic and electrical resonance, respectively. The actuation method of these bimaterial cantilevers is expanded using electrothermal and fluid flow methods. The simple MEMS microcantilevers is highly versatile with attractive electro-optic response and forms a technology platform for numerous terahertz applications in the future.
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