{"title":"The investigation of three types of comb-drive actuator for MEMS inclinometer","authors":"K. Aung, B. M. Simonov, V. Kalugin, K. Linn","doi":"10.1109/EICONRUS.2018.8317442","DOIUrl":null,"url":null,"abstract":"To improve the sensitivity of the MEMS comb — drive inclinometer three shapes of the comb-drive: ordinary, triangular and curve were investigated. We used typical folded beam for displacement of rotor part. By calculating the results in ANSYS, the change of capacitance in curve shape comb-drive is more than in the other shapes. And the quality factor of curve shape actuator is higher than in other shape actuator. The curve shape comb-drive is more suitable for getting higher sensitivity for comb-drive MEMS inclinometer.","PeriodicalId":6562,"journal":{"name":"2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus)","volume":"59 1","pages":"1743-1745"},"PeriodicalIF":0.0000,"publicationDate":"2018-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EICONRUS.2018.8317442","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
To improve the sensitivity of the MEMS comb — drive inclinometer three shapes of the comb-drive: ordinary, triangular and curve were investigated. We used typical folded beam for displacement of rotor part. By calculating the results in ANSYS, the change of capacitance in curve shape comb-drive is more than in the other shapes. And the quality factor of curve shape actuator is higher than in other shape actuator. The curve shape comb-drive is more suitable for getting higher sensitivity for comb-drive MEMS inclinometer.
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