{"title":"A High-Performance Electrodynamic Micro-Receiver for Low-Frequency Wireless Power Transfer","authors":"M. A. Halim, S. E. Smith, J. Samman, D. Arnold","doi":"10.1109/MEMS46641.2020.9056444","DOIUrl":null,"url":null,"abstract":"We report the design, fabrication and characterization of a microfabricated electrodynamic wireless power transmission (EWPT) receiver that uses a bulk-micromachined silicon serpentine torsional suspension, NdFeB magnets, and precision-manufactured micro-coils. The 0.31 cm3 device generates 2.46 mW average power (7.9 mW/cm3) at a distance of 4 cm from a transmitter coil operating at 821 Hz and safely within allowable human exposure limits. Compared to a previously reported prototype, this micro-receiver is ∼40% smaller, offers ∼16x better magnetic field sensitivity and 1.7x higher power density for improved applicability for wirelessly charging wearable and bio-implantable devices.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"25 1","pages":"590-593"},"PeriodicalIF":0.0000,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS46641.2020.9056444","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
We report the design, fabrication and characterization of a microfabricated electrodynamic wireless power transmission (EWPT) receiver that uses a bulk-micromachined silicon serpentine torsional suspension, NdFeB magnets, and precision-manufactured micro-coils. The 0.31 cm3 device generates 2.46 mW average power (7.9 mW/cm3) at a distance of 4 cm from a transmitter coil operating at 821 Hz and safely within allowable human exposure limits. Compared to a previously reported prototype, this micro-receiver is ∼40% smaller, offers ∼16x better magnetic field sensitivity and 1.7x higher power density for improved applicability for wirelessly charging wearable and bio-implantable devices.
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