M. Yamada, Hajime Takeuchi, K. Mishima, K. Yoshimura, Kazuhiro Takahashi
{"title":"The solutions for 3D-NAND processes with Canon's latest KrF scanner","authors":"M. Yamada, Hajime Takeuchi, K. Mishima, K. Yoshimura, Kazuhiro Takahashi","doi":"10.1109/CSTIC.2017.7919772","DOIUrl":null,"url":null,"abstract":"The NAND type flash-memory is now used not only on smart phones or tablet PCs, but also adopted on infrastructures such as servers, etc.","PeriodicalId":6846,"journal":{"name":"2017 China Semiconductor Technology International Conference (CSTIC)","volume":"6 1","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2017-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 China Semiconductor Technology International Conference (CSTIC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CSTIC.2017.7919772","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
The NAND type flash-memory is now used not only on smart phones or tablet PCs, but also adopted on infrastructures such as servers, etc.
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