{"title":"On the Linearity of BST Thin Film Bulk Acoustic Resonators","authors":"M. Koohi, A. Mortazawi","doi":"10.1109/IMWS-AMP.2018.8457167","DOIUrl":null,"url":null,"abstract":"Preliminary measurement results on the linearity of intrinsically switchable BST thin film bulk acoustic resonators (FBARs) are presented. Ferroelectric BST possesses electricfield-piezoelectricity, or electrostriction, which is employed to design intrinsically switchable BST FBARs. The linearity of these switchable resonators is an important factor for designing intrinsically switchable filters. The linearity of a single resonator is compared with two cascaded doubled size BST resonators. Third-order intercept point (IP3) measurement is performed, demonstrating the input IP3 improvement from 39 dBm to 43 dBm.","PeriodicalId":6605,"journal":{"name":"2018 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)","volume":"20 1","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMWS-AMP.2018.8457167","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

Abstract

Preliminary measurement results on the linearity of intrinsically switchable BST thin film bulk acoustic resonators (FBARs) are presented. Ferroelectric BST possesses electricfield-piezoelectricity, or electrostriction, which is employed to design intrinsically switchable BST FBARs. The linearity of these switchable resonators is an important factor for designing intrinsically switchable filters. The linearity of a single resonator is compared with two cascaded doubled size BST resonators. Third-order intercept point (IP3) measurement is performed, demonstrating the input IP3 improvement from 39 dBm to 43 dBm.
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BST薄膜体声谐振器的线性特性研究
给出了本征可调BST薄膜体声谐振器线性度的初步测量结果。铁电BST具有电场-压电或电致伸缩特性,可用于设计本质可切换的BST fbar。这些可切换谐振器的线性度是设计本质可切换滤波器的一个重要因素。将单个谐振器的线性度与两个级联的倍尺寸BST谐振器进行了比较。进行了三阶截距点(IP3)测量,表明输入IP3从39 dBm提高到43 dBm。
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