Flexible Copper Metal Circuits via Desktop Laser Printed Masks

R. Ghosh, Xiaoya Liu, M. Z. Yates
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Abstract

A novel process is demonstrated that produces patterns of electrically conductive copper on a flexible polyimide film substrate using standard desktop laser printed toner and near room temperature aqueous chemistry. The laser toner acts as a mask to selectively block the ion exchange self‐metallization (IESM) reduction reaction that forms nanoscale silver or palladium coatings at the polyimide surface. The silver or palladium IESM coating is then used as a catalyst for electroless deposition of copper. Under appropriate conditions, the copper is deposited selectively on top of the catalyst layer. The resulting copper layer has a measured sheet resistance as low as 0.3 Ohms/sq. Electrical isolation is measured between copper traces spaced as close as 300 microns, and high conductivity is measured along traces with widths as low as 200 microns. The minimum pattern size appears to be limited primarily by the resolution of the laser toner pattern, as the IESM metal layer is observed to follow the contours of individual toner particles. The process avoids the use of high temperature, vacuum, and organic solvents and is thus suitable for very low cost prototyping or distributed manufacturing of simple electronic devices.
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基于桌面激光打印掩模的柔性铜金属电路
采用标准台式激光打印碳粉和接近室温的水化学方法,在柔性聚酰亚胺薄膜衬底上产生导电铜的新工艺。激光调色剂作为掩膜,选择性地阻断离子交换自金属化(IESM)还原反应,在聚酰亚胺表面形成纳米级银或钯涂层。然后将银或钯IESM涂层用作化学沉积铜的催化剂。在适当的条件下,铜选择性地沉积在催化剂层的顶部。由此产生的铜层具有低至0.3欧姆/平方的测量薄片电阻。电隔离是在距离接近300微米的铜线之间测量的,高导电性是沿着宽度低至200微米的走线测量的。最小图案尺寸似乎主要受限于激光碳粉图案的分辨率,因为观察到IESM金属层遵循单个碳粉颗粒的轮廓。该工艺避免了高温、真空和有机溶剂的使用,因此适用于非常低成本的原型制作或简单电子设备的分布式制造。
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