Nonlinear dynamics in dual frequency capacitive discharges

D. Ziegler, T. Mussenbrock, R. Brinkmann
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Abstract

This paper proposes an effective nonlinear model which derives from a mathematically demanding spatially resolved model by means of concentrating on the fundamental mode. Based on the obtained mode the interaction of the linear bulk and the nonlinear boundary sheath is analyzed. Comparing the results to traditional linear theory shows that nonlinear effects highly complicate the interaction of bulk and sheath. The low driving frequency as well as the high driving frequency contributes to electron heating within the discharge. It can be shown that this effect of nonlinear electron resonance heating considerably contributes to the total power budget of the discharge. Comparing calculated rf currents with experimentally obtained data provides qualitatively and quantitatively good results.
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双频电容放电的非线性动力学
本文通过集中研究基本模态,提出了一种有效的非线性模型,该模型是由数学上要求很高的空间分辨模型推导而来的。在此基础上,分析了线性体与非线性边界护套的相互作用。结果与传统的线性理论比较表明,非线性效应使体鞘相互作用高度复杂化。低驱动频率和高驱动频率都有助于放电内的电子加热。可以看出,非线性电子共振加热对放电的总功率收支有很大的贡献。将计算的射频电流与实验得到的数据进行比较,在定性和定量上都取得了良好的结果。
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