{"title":"Monolithic 3D (M3D) reconfigurable logic applications using extremely-low-power electron devices","authors":"W. Choi","doi":"10.1109/CSTIC.2017.7919753","DOIUrl":null,"url":null,"abstract":"CMOS and nano-electromechanical (NEM) hybrid reconfigurable logic (RL) circuits are implemented by using monolithic three-dimensional (M3D) integration process. Their operation and feasibility are discussed based on simulation and experimental results.","PeriodicalId":6846,"journal":{"name":"2017 China Semiconductor Technology International Conference (CSTIC)","volume":"28 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2017-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 China Semiconductor Technology International Conference (CSTIC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CSTIC.2017.7919753","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
CMOS and nano-electromechanical (NEM) hybrid reconfigurable logic (RL) circuits are implemented by using monolithic three-dimensional (M3D) integration process. Their operation and feasibility are discussed based on simulation and experimental results.
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