Parasitic resistance elimination for the flexibly thin film grid pressure sensor

Abstract

The original structure of the flexibly thin film grid pressure sensor often suffers from the parasitic resistance of itself structure. In order to eliminate the parasitic resistance, the new ldquointerlayerrdquo structure of this sensor with good performance indexes was brought forward and given out after defects of original structure were analyzed and pointed out. The detecting principle and fabricating procedures of new structure were narrated minutely in this paper. The corresponding experiment was done, based on the test device. The experimenting results showed that the new ldquointerlayerrdquo structure with good performance indexes could measure out interface pressure distribution between touching objects and further eliminate the parasitic resistance.