Hotspot Detection in Integrated Circuits by Two-photon-fluorescence-based Thermal Microscope

Guan-Yu Zhuo, Zu-Po Yang, M. Chan
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引用次数: 1

Abstract

For thermal images and related hotspot diagnosis on integrated circuits (ICs) during operation, we present a high temporal, spatial, and temperature resolution thermal microscope based on the thermal-optical properties of R6G thin film.
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基于双光子荧光热显微镜的集成电路热点检测
基于R6G薄膜的热光学特性,我们设计了一种高时间、空间和温度分辨率的热显微镜,用于集成电路运行过程中的热图像和相关热点诊断。
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