IDT-based Acoustic Wave Devices Using Ultrathin Lithium Niobate and Lithium Tantalate

Abstract

Ultrathin lithium niobite (LN) and lithium tantalate (LT) have opened a new era of acoustic wave devices. The performances such as impedance ratio, bandwidth and temperature stability of new types of devices are incredibly high compared with those of conventional ones. The R&D is showing a kind of boom in both industry and academia. In this paper, plate wave devices and HAL (Hetero Acoustic Layer) SAW (surface acoustic wave) devices using ultrathin LN or LT developed by the authors' group are described.