{"title":"Surface micromachined angular rate sensor","authors":"Jack D. Johnson, S. Zarabadi, D. Sparks","doi":"10.4271/950538","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":35781,"journal":{"name":"汽车工程","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1995-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"18","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"汽车工程","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.4271/950538","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"Engineering","Score":null,"Total":0}
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