Fabricating Microelectrode with Nano Radius Tip by Electrochemical Micromachining

Abstract

A fabrication technology of microelectrode with nano radius of its tip was presented in electrochemical micromachining (EMM). The mechanism of pulses EMM was expatriated firstly. The shaping principle of microelectrode and micro probe was analyzed. Based on the fundamental experimental behavior of EMM current, a control strategy of current density was proposed with the gap variance. Then an experimental setup was constructed with pulses power supply and a control computer, which could detect the machining process and control the current density. After the experiments of technology analyzed, some microelectrodes were fabricated successfully by tungsten filament. This could provide the simple microelectrode for further electro-machining or micro probe for scanning probe microscopy. Preliminary experimental results show the feasibility of EMM and its potential capability for better machining accuracy and smaller machining size