Forming random-micropores by optimized 2-step metal assisted etching process

T. Chong, K. Weber, A. Blakers
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引用次数: 2

Abstract

We present a reliable and cost effective 2-step metal-assisted-etching (MAE) texturing technique that forms random-micropores. The optical behavior of the random-micropores is systematically studied. We demonstrate that the random-micropore morphology is capable of suppressing front surface reflection more efficiently than not only the conventional acidic texturing but also the widely used random pyramid texture. We demonstrate that the angular reflectance distribution of our random-micropores is intermediate between isotexture and random upright pyramid structures. These results strongly suggest that the random-nanopore texture can outperform isotexture and random upright pyramid morphology when encapsulated. Due to its nano-scale feature size, it can be used for texturing both mono-crystalline (c-si) and multi-crystalline (mc-si) silicon solar cells, as well as non-conventional thin Si solar cells such as SLIVER cells that feature surfaces that cannot easily be textured using established texturing techniques. The uniformity and reproducibility of the morphology have also been verified.
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优化两步金属辅助蚀刻工艺形成随机微孔
我们提出了一种可靠且具有成本效益的两步金属辅助蚀刻(MAE)纹理技术,可以形成随机微孔。系统地研究了随机微孔的光学特性。我们证明了随机微孔形态不仅比传统的酸性纹理更有效地抑制前表面反射,而且比广泛使用的随机金字塔纹理更有效。我们证明了随机微孔的角反射率分布介于等织构和随机直立金字塔结构之间。这些结果强烈表明,当被封装时,随机纳米孔结构优于等织构和随机直立金字塔形态。由于其纳米级的特征尺寸,它可以用于纹理单晶(c-si)和多晶(mc-si)硅太阳能电池,以及非传统的薄硅太阳能电池,如SLIVER电池,其特征表面不能使用现有的纹理技术轻易地纹理化。形貌的均匀性和再现性也得到了验证。
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