T. Lipateva, A. Okhrimchuk, A. Lipatiev, S. Lotarev, V. Sigaev
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引用次数: 0
Abstract
We report the effect of the pulse energy and laser beam scanning speed variation on control and intensification of the femtosecond laser-assisted wet etching of Nd:YAG crystals resulting in the fabrication of hollow tracks. Applying the optimized laser exposure parameters enables an increase of the etching rates at the initial stages
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