Rapid X-band microwave breakdown in Ne

J. Scharer, X. Xiang, B. Kupczyk, J. Booske
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Abstract

Observations of rapidly formed (<;50-400 ns) distributed plasma discharges using X-band microwaves in Neon with 1 mTorr residual air are presented. A stainless steel cylindrical discharge test chamber is used to observe microwave breakdown at 10 to 760 torr pressures. The chamber is enclosed with polycarbonate windows on both ends and has two side ports. The magnetron illuminates the chamber using 25 kW, 9.382 GHz and 0.8 μs pulse-width power through an X-band waveguide pressed against the polycarbonate window. Microwave diodes are used to measure incident, reflected, and transmitted microwave power to a moveable monopole antenna located beyond the discharge chamber. They provide information to determine the discharge reflection and attenuation characteristics as the pressure is varied. Observations of localized transmission power reduction measurements of -20 dB that occur within 50-400 ns caused by the plasma under different conditions have been made. Optical emission spectra experiments allow one to determine the gas temperature of the plasma at different pressures. Microwave mixers are used to compare both the amplitude and phase of the reflected signals in phase and in quadrature (90 degrees) relative to a fixed phase reference signal. Together with a six region 1-D plasma modeling code, the effective plasma density, collision frequency and electron temperature are estimated. An ICCD provides fast (<;50 ns) time-scale optical images to estimate the plasma size, also revealing the plasma formation and decay processes.
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Ne中的快速x波段微波击穿
用x波段微波在残余空气为1mtorr的氖中观察了快速形成的(< 50- 400ns)分布等离子体放电。采用不锈钢圆柱放电试验箱,在10 ~ 760托耳压力下观察微波击穿。该腔室两端用聚碳酸酯窗封闭,并有两个侧孔。磁控管通过压在聚碳酸酯窗口上的x波段波导,以25 kW, 9.382 GHz和0.8 μs脉宽的功率照射腔室。微波二极管用于测量入射、反射和传输到位于放电室外的可移动单极天线的微波功率。当压力变化时,它们提供了确定放电反射和衰减特性的信息。对不同条件下等离子体在50 ~ 400ns范围内引起的局部传输功率降低- 20db的测量结果进行了观察。光学发射光谱实验可以测定等离子体在不同压力下的气体温度。微波混频器用于比较反射信号的相位和正交(90度)相对于固定相位参考信号的幅度和相位。结合六区一维等离子体模拟代码,估计了有效等离子体密度、碰撞频率和电子温度。ICCD提供快速(< 50 ns)的时间尺度光学图像来估计等离子体的大小,也揭示了等离子体的形成和衰变过程。
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