Yun Huang, Zhuojie Chen, Shengxiao Jin, Jia Zhu, Bocheng Yu, Wengang Wu, R. Zhu, Jun Xu
{"title":"Precise Fabrication of Gap-Tunable Nanoantennas for Plasmon-Enhanced Spectroscopy and Biosensing","authors":"Yun Huang, Zhuojie Chen, Shengxiao Jin, Jia Zhu, Bocheng Yu, Wengang Wu, R. Zhu, Jun Xu","doi":"10.1109/MEMS46641.2020.9056322","DOIUrl":null,"url":null,"abstract":"This paper reports an arrayed nanometer precision gap-tunable bowtie nanoantennas fabricated by focused helium ion beam (HIB) milling. Plasmonic resonance is excited and tightly localized inside the nanogaps of the bowtie nanoantennas. Both numerical simulations and cathodoluminescence (CL) measurements manifest that the plasmon coupling resonance is significantly enhanced by decreasing the nanoantennas' gap width down to sub-10 nm scale. The stronger plasmon resonance also leads to a remarkable improvement of the spectral sensitivity to the surrounding media changes, which can be used to detect streptavidin with the concentration down to 100 ng/mL by simply monitoring the spectral shift.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"99 1","pages":"1179-1182"},"PeriodicalIF":0.0000,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS46641.2020.9056322","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper reports an arrayed nanometer precision gap-tunable bowtie nanoantennas fabricated by focused helium ion beam (HIB) milling. Plasmonic resonance is excited and tightly localized inside the nanogaps of the bowtie nanoantennas. Both numerical simulations and cathodoluminescence (CL) measurements manifest that the plasmon coupling resonance is significantly enhanced by decreasing the nanoantennas' gap width down to sub-10 nm scale. The stronger plasmon resonance also leads to a remarkable improvement of the spectral sensitivity to the surrounding media changes, which can be used to detect streptavidin with the concentration down to 100 ng/mL by simply monitoring the spectral shift.