High/low pulse generation of deadbeat based high power DC-DC converter with very short rise time

Abstract

Radio frequency (RF) generators are used in semiconductor product manufacture. They supply high power pulse to a plasma chamber. Recently, many semiconductor products are used in electronic devices, which are getting smaller and smaller. In proportion to this, the machines which manufacture semiconductor products require higher frequency High/Low (HL) pulse power to the RF generators. A higher frequency HL pulse can be obtained by decreasing an output capacitance. However, this leads to a decrease of the output voltage stability. To solve this conflict, iLref deadbeat control method is proposed to improve them. The stability of the proposed control method was verified and improved through the evaluation, which used the equivalent transfer function of the control system. The experimental results prove that the experimental circuit was able to generate the stable 120 V/12 V HL-pulse output without voltage overshoot when the input voltage was 240V. The results also show the rise time (0 % to 99 %) was about 510 μs, that is the slew rate at rising of the output voltage was about 210 kV/sec.