Design and analysis of a vertically moving voice coil motor with gravity compensation for semiconductor equipment

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Sensors and Actuators A-physical Pub Date : 2022-09-01 DOI:10.1016/j.sna.2022.113735

Kyung-min Lee

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引用次数: 3

Abstract

In this paper, a voice coil motor (VCM) that generates a constant upward force over a working range without excitation where the magnitude of the force is matched to the that of the payload on the armature of the VCM is presented. As a result, the VCM does not consume energy to support the payload. It minimizes the thermal expansion by Joule heating and improves the accuracy of the semiconductor equipment. The developed VCM comprises two permanent magnets, a coil winding, a stator, and an armature. The armature is made of a ferromagnetic material and generates two magnetic forces by two magnetic reluctances. The armature is shaped to maintain the sum of the two magnetic forces over its working range. The armature was designed using finite element and design parameter analyses, and the final design that satisfied the design requirements was attained. The prototype of the VCM was manufactured, and its performance was verified experimentally. It generated a constant upward force (20.9 N) over its working range (4.5 mm) without excitation. The dynamic response to step inputs for 240 nm/step was measured, and it was verified that current flowed only when the armature moved; the armature remained vertically stationary without excitation.

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半导体设备重力补偿式垂直移动音圈电机的设计与分析

在本文中，提出了一种音圈电机(VCM)，它在无激励的工作范围内产生恒定的向上力，力的大小与VCM电枢上有效载荷的大小相匹配。因此，VCM不消耗能量来支持有效载荷。它最大限度地减少了焦耳加热的热膨胀，提高了半导体设备的精度。所开发的VCM包括两个永磁体、一个线圈绕组、一个定子和一个电枢。电枢由铁磁材料制成，通过两种磁阻产生两种磁力。电枢的形状是为了在其工作范围内保持两个磁力的总和。对电枢进行了有限元分析和设计参数分析，得到了满足设计要求的最终设计方案。制作了VCM样机，并对其性能进行了实验验证。在没有激励的情况下，它在其工作范围(4.5 mm)上产生恒定的向上力(20.9 N)。测量了240 nm/阶跃输入时的动态响应，验证了电枢只有移动时电流才会流动;电枢在没有激励的情况下保持垂直静止。

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...