{"title":"The Effect of Perimeter Geometry on FBAR Resonator Electrical Performance","authors":"R. Ruby, J. Larson, C. Feng, S. Fazzio","doi":"10.1109/MWSYM.2005.1516563","DOIUrl":null,"url":null,"abstract":"We describe the first four Lamb-Rayleigh modes seen in an FBAR resonator. We also describe the effect of apodization (non parallel edges) have on the kx-ky space as compared to square resonators.","PeriodicalId":13133,"journal":{"name":"IEEE MTT-S International Microwave Symposium Digest, 2005.","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2005-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"56","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE MTT-S International Microwave Symposium Digest, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MWSYM.2005.1516563","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 56
Abstract
We describe the first four Lamb-Rayleigh modes seen in an FBAR resonator. We also describe the effect of apodization (non parallel edges) have on the kx-ky space as compared to square resonators.
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