Universal Length Dependence of Tensile Stress in Nanomechanical String Resonators

Maximilian Bückle, Yannick S. Klaß, Felix B. Nägele, R. Braive, E. Weig
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引用次数: 6

Abstract

We investigate the tensile stress in freely suspended nanomechanical string resonators, and observe a material-independent dependence on the resonator length. We compare strongly stressed sting resonators fabricated from four different material systems based on amorphous silicon nitride, crystalline silicon carbide as well as crystalline indium gallium phosphide. The tensile stress is found to increase by approximately 50% for shorter resonators. We establish a simple elastic model to describe the observed length dependence of the tensile stress. The model accurately describes our experimental data. This opens a perspective for stress-engineering the mechanical quality factor of nanomechanical string resonators.
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纳米弦谐振器中拉应力的普遍长度依赖性
我们研究了自由悬浮纳米机械弦谐振器中的拉应力,并观察到谐振器长度与材料无关。我们比较了由非晶氮化硅、晶体碳化硅和晶体磷化铟镓四种不同材料体系制成的强应力刺谐振器。对于较短的谐振器,拉伸应力增加了约50%。我们建立了一个简单的弹性模型来描述观察到的拉应力与长度的关系。该模型准确地描述了我们的实验数据。这为纳米弦谐振器的力学质量因子的应力工程研究开辟了新的思路。
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