An angular rate sensor interface IC

Abstract

This paper describes an interface IC that maintains the vibration of a surface micro-machined yaw rate sensor and processes its angular rate signal. In addition, it provides the necessary electronics to compensate for the nonuniformities, parameter shifts with temperature, and offset and sensitivity variations of the sensor. The IC has been fabricated in a 1.2 /spl mu/m CMOS process that includes a high voltage MOS transistor. Experimental results of several key circuit blocks and the angular rate sensor system indicate proper operation over temperature and supply voltage.