{"title":"Beam Diameter Reduction by Optimization of an Extraction Condition in a Compact Ion Microbeam System","authors":"Takeru Ohkubo, Yasuyuki Ishii","doi":"10.1016/j.phpro.2017.09.022","DOIUrl":null,"url":null,"abstract":"<div><p>A several hundred keV class compact proton microbeam system was developed as a prototype of a 1 MeV compact microbeam system to be used in micro-fabrication and micro-analyses. Optimization of an extraction condition was performed to increase demagnification and to achieve a beam diameter of approximately 1<!--> <!-->μm. The beam diameter measurement showed that a diameter of 1.8<!--> <!-->μm was obtained. This indicates that the compact microbeam system is a feasible alternative to a MeV class conventional large accelerator system.</p></div>","PeriodicalId":20407,"journal":{"name":"Physics Procedia","volume":"90 ","pages":"Pages 79-84"},"PeriodicalIF":0.0000,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/j.phpro.2017.09.022","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Physics Procedia","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1875389217301815","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
A several hundred keV class compact proton microbeam system was developed as a prototype of a 1 MeV compact microbeam system to be used in micro-fabrication and micro-analyses. Optimization of an extraction condition was performed to increase demagnification and to achieve a beam diameter of approximately 1 μm. The beam diameter measurement showed that a diameter of 1.8 μm was obtained. This indicates that the compact microbeam system is a feasible alternative to a MeV class conventional large accelerator system.
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