{"title":"Phase noise of high Q silicon nitride nanomechanical resonators","authors":"K. Fong, W. Pernice, H. Tang","doi":"10.1364/CLEO_SI.2012.CW3M.4","DOIUrl":null,"url":null,"abstract":"We study noise characteristics of high Q silicon nitride nanomechanical resonators integrated in a nanophotonic circuit. Quality factor up to 2.2 million is measured and an intrinsic frequency noise spectrum with kBT/f dependence is observed.","PeriodicalId":6442,"journal":{"name":"2012 Conference on Lasers and Electro-Optics (CLEO)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2012-05-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 Conference on Lasers and Electro-Optics (CLEO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/CLEO_SI.2012.CW3M.4","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We study noise characteristics of high Q silicon nitride nanomechanical resonators integrated in a nanophotonic circuit. Quality factor up to 2.2 million is measured and an intrinsic frequency noise spectrum with kBT/f dependence is observed.
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