Self-powered pressure sensors based on triboelectric nanogenerator

Mengfei Xu, K. Tao, Zhensheng Chen, Hao Chen
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Abstract

In order to collect mechanical energy in the environment for self-powered sensor applications, a self-powered capacitive pressure sensor with liquid alloy composite as electrode is developed based on triboelectric nanogenerator (TENG). A micro-pyramid structure is fabricated on the surface of polydimethylsiloxane (PDMS) to improve the performance of the pressure sensor. Test results show that the sensitivity of the pressure sensor is increased by 86.26% compared with the sensor without the micro-pyramid structure. The sensor also has an outstanding output performance. When resistance is 100 MΩ, power output has reached nearly 64 μW.
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基于摩擦电纳米发电机的自供电压力传感器
为了在环境中收集机械能,实现自供电传感器的应用,研制了一种基于摩擦纳米发电机(TENG)的自供电电容式压力传感器,其电极为液态合金复合材料。为了提高压力传感器的性能,在聚二甲基硅氧烷(PDMS)表面制备了微金字塔结构。测试结果表明,与未采用微金字塔结构的传感器相比,该压力传感器的灵敏度提高了86.26%。该传感器还具有出色的输出性能。当电阻为100 MΩ时,输出功率已接近64 μW。
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