Reduction of machining motion error of an aspheric surface coordinate measuring machine by a new error compensation method

Abstract

This paper suggests a new method to reduce the machine motion errors of a 2-dimension aspheric surface measuring. Using the laser interferometer to measure the site error of each point instead of the position error, straightness error and yaw and pitch error. Through error compensation of the new method, the simulation results and verification experiments showed that the site errors agree well within less than 5μm in the whole space. The new mathematical model, the calibration method and the data analysis method are described in detail in the paper.