Nitrogen sorption tests, SEM-windowless EDS and XRD analysis of mechanically alloyed nanocrystalline getter materials

Abstract

Gas absorbing materials (getters) find several applications in modern vacuum technology; in particular to maintain required vacuum levels in evacuated and sealed enclosures. The gas absorbing properties of these getters depend on the physico-chemical nature of their surfaces. The aim of this work is to study the absorption properties of commercial Zr-based alloys (non-evaporable getters) after mechanical alloying by means of a high vacuum planetary ball milling equipped with an in-situ compaction facility. The main aim was to refine the grain size and to develop particular defect structures to enhance the getter properties. The results have shown an improvement of the specific pumping speed of the ball milled commercial Zr-Zr(V,Fe)₂ alloy with respect to the starting microcrystalline material. In particular, under our experimental conditions, the specific pumping speed vs absorbed gas curve presents a maximum after 2 hours of milling; prolonged milling reduced the pumping speed of the alloyed material. This behaviour is explained in terms of two opposing simultaneous chemical and structural effects.