{"title":"제조 방법에 따른 Titanium Disilicide 막의 특성","authors":"모만진, 전법주, 정일현","doi":"10.1002/9780470114735.hawley16053","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":17379,"journal":{"name":"Journal of the Korean Industrial and Engineering Chemistry","volume":"14 1","pages":"354-361"},"PeriodicalIF":0.0000,"publicationDate":"1999-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of the Korean Industrial and Engineering Chemistry","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1002/9780470114735.hawley16053","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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