High-Q silicon microsphere whispering gallery mode resonator fabricated by laser induced in-fiber capillary instability

Jing Zhang, Kaiwei Li, Mengying Zhang, Ting Zhang, Lei Wei
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Abstract

A method of fabricating silicon microsphere resonators feathered high quality factor whispering gallery modes of ∼ 0.8 × 106 is demonstrated. We fabricate the silicon microspheres from silica-cladding/silicon-core fiber based on the CO2 laser induced in-fiber capillary instability phenomenon.
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激光诱导光纤内毛细不稳定性制备高q硅微球窃窃廊模式谐振腔
提出了一种制造高质量因子低语通道模式为~ 0.8 × 106的硅微球谐振器的方法。利用CO2激光诱导的光纤内毛细不稳定现象,利用硅包层/硅芯光纤制备了硅微球。
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