{"title":"Stochastic heating in capacitively coupled plasmas","authors":"M. Bayrak, R. Brinkmann","doi":"10.1109/PLASMA.2008.4590832","DOIUrl":null,"url":null,"abstract":"This paper presents a new numerical method for solving the reduced kinetic equation. This technique is based on the finite volume control method, which is often used in computational fluid dynamics. Additionally, in the boundary conditions the stochastic heating mechanism of the sheath is taken into account. Furthermore, the quasineutrality condition instead of the Poisson equation to solve the potential is used.","PeriodicalId":6359,"journal":{"name":"2008 IEEE 35th International Conference on Plasma Science","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2008-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE 35th International Conference on Plasma Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PLASMA.2008.4590832","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper presents a new numerical method for solving the reduced kinetic equation. This technique is based on the finite volume control method, which is often used in computational fluid dynamics. Additionally, in the boundary conditions the stochastic heating mechanism of the sheath is taken into account. Furthermore, the quasineutrality condition instead of the Poisson equation to solve the potential is used.
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