Laser machining fundamentals: micro, nano, atomic and close-to-atomic scales

IF 16.1 1区 工程技术 Q1 ENGINEERING, MANUFACTURING International Journal of Extreme Manufacturing Pub Date : 2023-01-07 DOI:10.1088/2631-7990/acb134
Jinshi Wang, F. Fang, Hao An, Shang-Hua Wu, Huimin Qi, Yuexuan Cai, Guanyu Guo
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引用次数: 8

Abstract

With the rapid development in advanced industries, such as microelectronics and optics sectors, the functional feature size of devises/components has been decreasing from micro to nanometric, and even ACS for higher performance, smaller volume and lower energy consumption. By this time, a great many quantum structures are proposed, with not only an extreme scale of several or even single atom, but also a nearly ideal lattice structure with no material defect. It is almost no doubt that such structures play critical role in the next generation products, which shows an urgent demand for the ACSM. Laser machining is one of the most important approaches widely used in engineering and scientific research. It is high-efficient and applicable for most kinds of materials. Moreover, the processing scale covers a huge range from millimeters to nanometers, and has already touched the atomic level. Laser–material interaction mechanism, as the foundation of laser machining, determines the machining accuracy and surface quality. It becomes much more sophisticated and dominant with a decrease in processing scale, which is systematically reviewed in this article. In general, the mechanisms of laser-induced material removal are classified into ablation, CE and atomic desorption, with a decrease in the scale from above microns to angstroms. The effects of processing parameters on both fundamental material response and machined surface quality are discussed, as well as theoretical methods to simulate and understand the underlying mechanisms. Examples at nanometric to atomic scale are provided, which demonstrate the capability of laser machining in achieving the ultimate precision and becoming a promising approach to ACSM.
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激光加工基础:微、纳米、原子和近原子尺度
随着微电子、光学等先进工业的快速发展,器件/元件的功能特征尺寸已从微级逐渐减小到纳米级,甚至实现了高性能、小体积、低能耗的ACS。此时,提出了大量的量子结构,不仅有几个甚至单个原子的极端尺度,而且有接近理想的晶格结构,没有材料缺陷。毫无疑问,这种结构在下一代产品中发挥着至关重要的作用,这表明了对ACSM的迫切需求。激光加工是广泛应用于工程和科学研究的重要加工方法之一。它效率高,适用于大多数材料。此外,加工规模涵盖了从毫米到纳米的巨大范围,并且已经达到了原子水平。激光与材料的相互作用机理是激光加工的基础,决定着加工精度和表面质量。随着加工规模的减小,它变得越来越复杂和占主导地位,本文对此进行了系统的综述。一般来说,激光诱导材料去除的机制分为烧蚀、CE和原子脱附,从微米以上的尺度降低到埃。讨论了加工参数对基本材料响应和加工表面质量的影响,以及模拟和理解其潜在机制的理论方法。给出了纳米到原子尺度的实例,证明了激光加工在实现极限精度方面的能力,并成为一种有前途的ACSM方法。
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来源期刊
International Journal of Extreme Manufacturing
International Journal of Extreme Manufacturing Engineering-Industrial and Manufacturing Engineering
CiteScore
17.70
自引率
6.10%
发文量
83
审稿时长
12 weeks
期刊介绍: The International Journal of Extreme Manufacturing (IJEM) focuses on publishing original articles and reviews related to the science and technology of manufacturing functional devices and systems with extreme dimensions and/or extreme functionalities. The journal covers a wide range of topics, from fundamental science to cutting-edge technologies that push the boundaries of currently known theories, methods, scales, environments, and performance. Extreme manufacturing encompasses various aspects such as manufacturing with extremely high energy density, ultrahigh precision, extremely small spatial and temporal scales, extremely intensive fields, and giant systems with extreme complexity and several factors. It encompasses multiple disciplines, including machinery, materials, optics, physics, chemistry, mechanics, and mathematics. The journal is interested in theories, processes, metrology, characterization, equipment, conditions, and system integration in extreme manufacturing. Additionally, it covers materials, structures, and devices with extreme functionalities.
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