Investigation of Zerodur Glass Ceramic Material Characterization to Predict the Relationship between Surface Roughness and Subsurface Damage

şaban Ötenkaya, R. Ünal
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Abstract

Due to the brittle nature of the optical parts used in the grinding process to obtain a good surface quality, surface roughness and subsurface damage occur after the machining. These subsurface damages must be detected and destroyed with the help of post-process processes such as polishing. Because detecting these damages is time-consuming and costly, many researchers have tried relationship between subsurface damage and surface roughness since it is easier to detect and measure. In this study, Zerodur glass ceramic material characterization tests were carried out to predict the surface roughness and damage under the surface, and the material properties were determined to be specific to the sample. The grinding parameters taken from the previous studies and the values given for surface roughness and subsurface damage were examined with the help of the Lambropoulos theoretical model. The results theoretically showed that with the characterization of material properties different from those given in the literature, even if the parameters used in the experimental study do not change, much more severe subsurface damage will be created on the sample, and the load value applied to the material will increase significantly. For this reason, it is crucial to determine the material's mechanical properties by performing characterization tests before all material grinding and post-processing processes.
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零度玻璃陶瓷材料表征与表面粗糙度与亚表面损伤关系的研究
由于光学零件的脆性,在磨削加工过程中要获得良好的表面质量,加工后会出现表面粗糙度和亚表面损伤。这些亚表面损伤必须在抛光等后处理过程的帮助下检测和破坏。由于检测这些损伤既耗时又昂贵,许多研究人员尝试将亚表面损伤与表面粗糙度之间的关系联系起来,因为亚表面损伤更容易检测和测量。本研究通过对Zerodur玻璃陶瓷材料进行表征试验,预测其表面粗糙度和表面下的损伤,并确定其材料性能是针对样品的。利用Lambropoulos理论模型对前人研究的磨削参数、表面粗糙度和亚表面损伤值进行了检验。结果从理论上表明,当材料的性能表征与文献中给出的不同时,即使实验研究中使用的参数不变,也会在样品上产生更严重的亚表面损伤,并且施加在材料上的载荷值也会显著增加。因此,在所有材料研磨和后处理过程之前,通过进行表征测试来确定材料的机械性能至关重要。
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