Towards wall-coated microfabricated cells: Alkali vapor-cells using indium thin-film low-temperature bonding

R. Straessle, Y. Petremand, D. Briand, N. D. de Rooij, M. Pellaton, C. Affolderbach, G. Mileti
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引用次数: 2

Abstract

We report on the realization and evaluation of micro-fabricated alkali vapor cells using a thin-film indium bonding technique. Optical and double-resonance spectroscopy performed on the cells demonstrates their suitability for atomic clock applications. Long-term measurements show a stable pressure inside the cells and therefore an excellent hermeticity of the bonding over several months. The low bonding process temperature of ≤ 140°C combined with good bond strength makes this method a promising candidate for realizing micro-fabricated alkali cells with anti-relaxation wall-coatings.
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向壁涂微加工电池发展:使用铟薄膜低温键合的碱蒸汽电池
本文报道了利用薄膜铟键合技术制备微型碱蒸汽电池的实现和评价。光学和双共振光谱对细胞进行了验证,证明了它们适用于原子钟应用。长期测量表明,在几个月的时间里,细胞内的压力稳定,因此结合的密封性很好。结合温度低(≤140°C),结合良好的结合强度,使该方法成为具有抗松弛壁涂层的微制造碱电池的理想选择。
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