{"title":"Reproducibility and free spectral range (FSR) control of a high quality factor — 1D photonic crystal (PhC) extended cavity","authors":"A. M. Md Zain, B. Majlis, Richard M. De La Rue","doi":"10.1109/RSM.2015.7355023","DOIUrl":null,"url":null,"abstract":"In this paper we report successful experimental demonstration of consistency in controlling the resonance quality factor (Q-factor) value in the range from 1000 to 80,000, together with good free spectral range (FSR) control in the range from 30 nm to 62 nm - for an extended cavity. We have also demonstrated good repeatability of high Q-factor values for 1D photonic crystal (PhC)/Photonic wire (PhW) extended cavities based on Silicon-on-Insulator (SOI) using different fabrication cycles. The cavities that are considered in this paper range from 2 μm to 8.25 μm in length. The Q-factors for each resonance obtained for particular extended cavities have been measured on different occasions, with 5% variation in the Q-value over an extended period of time.","PeriodicalId":6667,"journal":{"name":"2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","volume":"134 1","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2015-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/RSM.2015.7355023","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
In this paper we report successful experimental demonstration of consistency in controlling the resonance quality factor (Q-factor) value in the range from 1000 to 80,000, together with good free spectral range (FSR) control in the range from 30 nm to 62 nm - for an extended cavity. We have also demonstrated good repeatability of high Q-factor values for 1D photonic crystal (PhC)/Photonic wire (PhW) extended cavities based on Silicon-on-Insulator (SOI) using different fabrication cycles. The cavities that are considered in this paper range from 2 μm to 8.25 μm in length. The Q-factors for each resonance obtained for particular extended cavities have been measured on different occasions, with 5% variation in the Q-value over an extended period of time.
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