А. V. Kozinets, A. Manilov, S. Alekseev, S. Litvinenko, V. Lysenko, V. Skryshevsky
{"title":"Deep Silicon Barrier Structure as Chemical Sensor for Detection of Hydrochloric Acid Salt Solutions","authors":"А. V. Kozinets, A. Manilov, S. Alekseev, S. Litvinenko, V. Lysenko, V. Skryshevsky","doi":"10.21272/jnep.12(3).03015","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":16514,"journal":{"name":"Journal of Nano- and Electronic Physics","volume":"9 1","pages":"03015-1-03015-5"},"PeriodicalIF":0.0000,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Nano- and Electronic Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.21272/jnep.12(3).03015","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}