Xianfu Dai, Yumei Jing, Rongqi Wu, Kui Tang, Xiaochi Liu, Jian Sun
{"title":"Impact of in‐situ oxidation‐resulted high‐k passivation layer on device stability and mobility improvement","authors":"Xianfu Dai, Yumei Jing, Rongqi Wu, Kui Tang, Xiaochi Liu, Jian Sun","doi":"10.1002/pssr.202300162","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":20059,"journal":{"name":"physica status solidi (RRL) – Rapid Research Letters","volume":"21 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"physica status solidi (RRL) – Rapid Research Letters","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1002/pssr.202300162","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}