Porous Epoxy Film for Low Dielectric Constant Chip Substrates and Boards

Jisu Jiang, O. Phillips, Landon Keller, P. Kohl
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引用次数: 1

Abstract

Lowering the dielectric constant of interconnect, substrates and boards for electronic devices is needed to achieve faster switching speed and smaller electronic device packages. A feasible way to reduce the dielectric constant of existing material is by introducing porosity within the dielectric film. The density of pores and pore size play an important role in determining the mechanical property and electrical property of the film. An increase in the pore fraction leads to lower dielectric constant. However, higher pore fraction can deteriorate the mechanical properties. Therefore, it is important to achieve a balance between dielectric constant and mechanical properties. In this study, a low molecular weight sacrificial polymer poly(propylene carbonate) was functionalized with epoxide groups to increase its miscibility in an FR4 epoxy resin formulation by cross-linking it with the epoxy matrix. During or after curing, the epoxy resin can be heated to a temperature to generate the porous structure by evolution of the sacrificial polymer products. The mechanical and dielectric properties were measured to show the feasibility of using this modified sacrificial polymer in existing FR4 epoxy formulations to achieve lower dielectric constant interconnect.
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用于低介电常数芯片衬底和电路板的多孔环氧树脂薄膜
为了实现更快的开关速度和更小的电子器件封装,需要降低电子器件互连、衬底和电路板的介电常数。降低现有材料介电常数的可行方法是在介电膜内引入孔隙。孔隙密度和孔径大小对薄膜的力学性能和电学性能起着重要的决定作用。孔隙分数的增加导致介电常数的降低。然而,孔隙率越高,其力学性能越差。因此,在介电常数和力学性能之间取得平衡是很重要的。在本研究中,一种低分子量牺牲聚合物聚碳酸丙烯酯被环氧基团功能化,通过与环氧基体交联来增加其在FR4环氧树脂配方中的混溶性。在固化过程中或固化后,可以将环氧树脂加热到一定温度,通过牺牲聚合物产物的演化产生多孔结构。通过力学性能和介电性能的测试,证明了在现有的FR4环氧树脂配方中使用这种改性牺牲聚合物实现低介电常数互连的可行性。
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