Optimization of process parameters of thin film deposition in solar PV cells using magnetron sputtering process

N. Purushothaman, R. Elansezhian, A. Raviprakash
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Abstract

India is the 6th largest consumer of electricity in the world. The revenue losses due to power failure are rising at an alarming rate of 11.9% in last 5 years. The negative effects of the conventional energy sources can be overcome by making use of the solar energy with additional advantages, but there are significant challenges to be overcome in order to make use of clean energy. They are as follows: energy cost, energy fluctuation, location dependency, and huge investment requirement, losses in solar cell and poor energy conversion efficiency in the order to 14%. In this research, an experimental investigation has been carried out to improve the energy efficiency of solar PV cells by texturing three different metals such as Cu, Ag and Al over the solar PV cells at specific places by using RF and DC magnetron sputtering process. To study the properties of the thin film, the process parameters such as power, deposition time and substrate temperature were optimized and corresponding coating thickness, optical properties and surface topography were investigated. The coating thickness and surface roughness increased when the power increased from 15W to 45W. Average surface roughness (Ra) of 6nm was obtained at the optimum power of 45W with deposition rate of 5-7 mins. The surface morphology and topography was characterized by using SEM and AFM which shows uniform coating with spherical shaped nanoparticles deposited over the substrate at 300°C. UV-VIS-NIR spectrometer indicates that the optical absorption is increased from 1.31% to 1.68% at the wavelength range from 250 to 314nm. The reflection was reduced from 13.4% to 3.67% and the conversion efficiency was increased from 14% to 20%. The complete experimental details, results and analysis are reported in this paper.India is the 6th largest consumer of electricity in the world. The revenue losses due to power failure are rising at an alarming rate of 11.9% in last 5 years. The negative effects of the conventional energy sources can be overcome by making use of the solar energy with additional advantages, but there are significant challenges to be overcome in order to make use of clean energy. They are as follows: energy cost, energy fluctuation, location dependency, and huge investment requirement, losses in solar cell and poor energy conversion efficiency in the order to 14%. In this research, an experimental investigation has been carried out to improve the energy efficiency of solar PV cells by texturing three different metals such as Cu, Ag and Al over the solar PV cells at specific places by using RF and DC magnetron sputtering process. To study the properties of the thin film, the process parameters such as power, deposition time and substrate temperature were optimized and corresponding coating thickness, opti...
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磁控溅射沉积太阳能光伏电池薄膜工艺参数的优化
印度是世界第六大电力消费国。在过去的5年里,由于电力故障造成的收入损失正以惊人的11.9%的速度增长。利用具有额外优势的太阳能可以克服传统能源的负面影响,但要利用清洁能源还需要克服重大挑战。分别是:能源成本高、能源波动大、位置依赖、投资需求大、太阳能电池损耗大、能量转换效率差。本研究利用射频和直流磁控溅射工艺在太阳能光伏电池的特定位置上织化Cu、Ag和Al三种不同的金属,以提高太阳能光伏电池的能量效率。为了研究薄膜的性能,优化了功率、沉积时间和衬底温度等工艺参数,并对相应的涂层厚度、光学性能和表面形貌进行了研究。当功率从15W增加到45W时,涂层厚度和表面粗糙度增加。在最佳功率为45W,沉积速率为5 ~ 7 min时,获得了平均表面粗糙度(Ra)为6nm。利用扫描电镜(SEM)和原子力显微镜(AFM)对表面形貌和形貌进行了表征,结果表明,在300℃温度下,衬底表面沉积了均匀的球形纳米颗粒。紫外-可见-近红外光谱分析表明,在250 ~ 314nm波长范围内,光吸收率由1.31%提高到1.68%。反射率由13.4%降低到3.67%,转换效率由14%提高到20%。本文报道了完整的实验细节、结果和分析。印度是世界第六大电力消费国。在过去的5年里,由于电力故障造成的收入损失正以惊人的11.9%的速度增长。利用具有额外优势的太阳能可以克服传统能源的负面影响,但要利用清洁能源还需要克服重大挑战。分别是:能源成本高、能源波动大、位置依赖、投资需求大、太阳能电池损耗大、能量转换效率差。本研究利用射频和直流磁控溅射工艺在太阳能光伏电池的特定位置上织化Cu、Ag和Al三种不同的金属,以提高太阳能光伏电池的能量效率。为了研究薄膜的性能,对功率、沉积时间、衬底温度等工艺参数进行了优化,并对相应的涂层厚度、光电性能和光电性能进行了优化。
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