Temperature-dependent transition of discharge pattern during helium cryo plasma

J. Choi, Y. Noma, K. Terashima
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Abstract

Summary form only given. New cryogenic plasma source, so-called cryo plasma was established under atmospheric pressure. Cryo dielectric barrier discharge (DBD) system could easily control processing temperature from room temperature to 78 K by liquid nitrogen. Reactor chamber for this experiment consisted of two chambers, the inner and outer chamber. We employed a DBD reactor into the inner chamber and connected an AC power supply operating at a frequency of 20 kHz. Helium as discharge gas was introduced into the inner chamber and the operating pressure was kept at atmospheric pressure, with a steady state condition. And the outer chamber played a role to control and sustain gas temperature by flowing liquid nitrogen as a refrigerant. After experiments, we found out the plasma properties, such as discharge patterns and color, showed the temperature- dependent behavior as gas temperature went down. And this result was closely related with the change of emission spectra measured by optical emission spectroscopy. Conclusively, the change of gas temperature induced a transition of discharge mode. The detail will be discussed at the conference.
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氦低温等离子体放电模式的温度依赖性转变
只提供摘要形式。在常压下建立了新的低温等离子体源,即低温等离子体。低温介质阻挡放电(DBD)系统可以很容易地通过液氮控制处理温度从室温到78 K。本实验的反应器室由内室和外室两部分组成。我们在内室使用了DBD电抗器,并连接了频率为20khz的交流电源。将氦气作为放电气体引入内腔,操作压力保持在常压下,处于稳态状态。外腔通过流动液态氮作为制冷剂,起到控制和维持气体温度的作用。实验发现,当气体温度降低时,等离子体的放电模式和颜色等特性表现出温度依赖性。这一结果与光学发射光谱测量的发射光谱变化密切相关。最后,气体温度的变化引起了放电模式的转变。细节将在会议上讨论。
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