Temperature-dependent transition of discharge pattern during helium cryo plasma

J. Choi, Y. Noma, K. Terashima
{"title":"Temperature-dependent transition of discharge pattern during helium cryo plasma","authors":"J. Choi, Y. Noma, K. Terashima","doi":"10.1109/PLASMA.2008.4590710","DOIUrl":null,"url":null,"abstract":"Summary form only given. New cryogenic plasma source, so-called cryo plasma was established under atmospheric pressure. Cryo dielectric barrier discharge (DBD) system could easily control processing temperature from room temperature to 78 K by liquid nitrogen. Reactor chamber for this experiment consisted of two chambers, the inner and outer chamber. We employed a DBD reactor into the inner chamber and connected an AC power supply operating at a frequency of 20 kHz. Helium as discharge gas was introduced into the inner chamber and the operating pressure was kept at atmospheric pressure, with a steady state condition. And the outer chamber played a role to control and sustain gas temperature by flowing liquid nitrogen as a refrigerant. After experiments, we found out the plasma properties, such as discharge patterns and color, showed the temperature- dependent behavior as gas temperature went down. And this result was closely related with the change of emission spectra measured by optical emission spectroscopy. Conclusively, the change of gas temperature induced a transition of discharge mode. The detail will be discussed at the conference.","PeriodicalId":6359,"journal":{"name":"2008 IEEE 35th International Conference on Plasma Science","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2008-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE 35th International Conference on Plasma Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PLASMA.2008.4590710","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

Abstract

Summary form only given. New cryogenic plasma source, so-called cryo plasma was established under atmospheric pressure. Cryo dielectric barrier discharge (DBD) system could easily control processing temperature from room temperature to 78 K by liquid nitrogen. Reactor chamber for this experiment consisted of two chambers, the inner and outer chamber. We employed a DBD reactor into the inner chamber and connected an AC power supply operating at a frequency of 20 kHz. Helium as discharge gas was introduced into the inner chamber and the operating pressure was kept at atmospheric pressure, with a steady state condition. And the outer chamber played a role to control and sustain gas temperature by flowing liquid nitrogen as a refrigerant. After experiments, we found out the plasma properties, such as discharge patterns and color, showed the temperature- dependent behavior as gas temperature went down. And this result was closely related with the change of emission spectra measured by optical emission spectroscopy. Conclusively, the change of gas temperature induced a transition of discharge mode. The detail will be discussed at the conference.
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
氦低温等离子体放电模式的温度依赖性转变
只提供摘要形式。在常压下建立了新的低温等离子体源,即低温等离子体。低温介质阻挡放电(DBD)系统可以很容易地通过液氮控制处理温度从室温到78 K。本实验的反应器室由内室和外室两部分组成。我们在内室使用了DBD电抗器,并连接了频率为20khz的交流电源。将氦气作为放电气体引入内腔,操作压力保持在常压下,处于稳态状态。外腔通过流动液态氮作为制冷剂,起到控制和维持气体温度的作用。实验发现,当气体温度降低时,等离子体的放电模式和颜色等特性表现出温度依赖性。这一结果与光学发射光谱测量的发射光谱变化密切相关。最后,气体温度的变化引起了放电模式的转变。细节将在会议上讨论。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Fabrication of multi-purpose probe to investigate the influence of ohmic magnetic field on density gradient in plasma Effects of nanosecond pulsed electromagnetic field on mitochondrial membrane potential Replaceable electrodes triggered vacuum switch and its application in lightning current component A generator Visualization of instabilities in hot magnetized plasmas by ECE Imaging Numerical simulation of nonthermal atmospheric pressure plasma jet and comparison with experiments
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1