The effect of scanning speed fluctuation to the precision of size measurement by laser scanning

Jiang Tao, Yu Zheng-lin, Cao Guohua, X. Hongji
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引用次数: 1

Abstract

This paper analyzes details the effect of scanning speed fluctuation to the precision of size measurement by laser scanning and proposes two on-line compensation methods. They have been proved to be applicable and feasible.
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扫描速度波动对激光扫描尺寸测量精度的影响
详细分析了扫描速度波动对激光扫描尺寸测量精度的影响,提出了两种在线补偿方法。实践证明,这些方法是适用的、可行的。
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