{"title":"The effect of scanning speed fluctuation to the precision of size measurement by laser scanning","authors":"Jiang Tao, Yu Zheng-lin, Cao Guohua, X. Hongji","doi":"10.1109/CLEOPR.2009.5292682","DOIUrl":null,"url":null,"abstract":"This paper analyzes details the effect of scanning speed fluctuation to the precision of size measurement by laser scanning and proposes two on-line compensation methods. They have been proved to be applicable and feasible.","PeriodicalId":6452,"journal":{"name":"2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics","volume":"20 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2009-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CLEOPR.2009.5292682","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This paper analyzes details the effect of scanning speed fluctuation to the precision of size measurement by laser scanning and proposes two on-line compensation methods. They have been proved to be applicable and feasible.
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