K. Sakuma, Huan Hu, S. Bedell, B. Webb, S. Wright, K. Latzko, M. Agno, J. Knickerbocker
{"title":"Flexible Piezoresistive Sensors Fabricated by Spalling Technique","authors":"K. Sakuma, Huan Hu, S. Bedell, B. Webb, S. Wright, K. Latzko, M. Agno, J. Knickerbocker","doi":"10.1109/IFETC.2018.8583971","DOIUrl":null,"url":null,"abstract":"In this research study, we present comprehensive characterizations of flexible silicon sensors fabricated using controlled spalling which uses fracture to produce thin films of single-crystal silicon directly from a bulk substrate. We characterized the property of the thin silicon film for sensing strain and temperature. The flexible sensor exhibits high sensitivity with a temperature coefficient of resistance of −0.16/°C, which is desirable for targeted health monitoring applications.","PeriodicalId":6609,"journal":{"name":"2018 International Flexible Electronics Technology Conference (IFETC)","volume":"1 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 International Flexible Electronics Technology Conference (IFETC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IFETC.2018.8583971","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
In this research study, we present comprehensive characterizations of flexible silicon sensors fabricated using controlled spalling which uses fracture to produce thin films of single-crystal silicon directly from a bulk substrate. We characterized the property of the thin silicon film for sensing strain and temperature. The flexible sensor exhibits high sensitivity with a temperature coefficient of resistance of −0.16/°C, which is desirable for targeted health monitoring applications.
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