Woodpile photonic crystal nanocavity by two-directional etching without wafer bonding

Lingling Tang, T. Yoshie
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Abstract

Compact ultra-high-Q modes are designed in a woodpile photonic crystal by mudulating unit cell size along a waveguide in a complete photonic band gap. These designs provide a means of simplifying the fabrication of woodpile photonic crystal nanocavities. The designed nanocavities are fabricated with a two-directional etching approach without wafer bonding.
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无晶圆键合的双向刻蚀Woodpile光子晶体纳米腔
在木桩光子晶体中,通过在完全光子带隙中沿波导调制单晶的大小,设计了紧凑的超高q模式。这些设计为简化木堆光子晶体纳米腔的制造提供了一种方法。设计的纳米空腔采用双向蚀刻方法制备,无需晶圆键合。
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