Woodpile photonic crystal nanocavity by two-directional etching without wafer bonding

Lingling Tang, T. Yoshie
{"title":"Woodpile photonic crystal nanocavity by two-directional etching without wafer bonding","authors":"Lingling Tang, T. Yoshie","doi":"10.1109/CLEOPR.2009.5292417","DOIUrl":null,"url":null,"abstract":"Compact ultra-high-Q modes are designed in a woodpile photonic crystal by mudulating unit cell size along a waveguide in a complete photonic band gap. These designs provide a means of simplifying the fabrication of woodpile photonic crystal nanocavities. The designed nanocavities are fabricated with a two-directional etching approach without wafer bonding.","PeriodicalId":6452,"journal":{"name":"2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2009-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CLEOPR.2009.5292417","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract

Compact ultra-high-Q modes are designed in a woodpile photonic crystal by mudulating unit cell size along a waveguide in a complete photonic band gap. These designs provide a means of simplifying the fabrication of woodpile photonic crystal nanocavities. The designed nanocavities are fabricated with a two-directional etching approach without wafer bonding.
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无晶圆键合的双向刻蚀Woodpile光子晶体纳米腔
在木桩光子晶体中,通过在完全光子带隙中沿波导调制单晶的大小,设计了紧凑的超高q模式。这些设计为简化木堆光子晶体纳米腔的制造提供了一种方法。设计的纳米空腔采用双向蚀刻方法制备,无需晶圆键合。
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