A resonant MEMS magnetic field sensor with electromagnetic induction sensing

Abstract

In this paper, we propose a novel magnetic field sensor, which exploits capacitive driving and electromagnetic induction sensing to detect the external magnetic field. The capacitive driving reduces the power dissipation and the electromagnetic induction sensing makes the output signal with high linearity. The measurement results verify that the sensitivity can be increased by increasing the sensing coil number. However, the sensitivity was found not in linear direct proportion to the sensing coil number. The measured sensitivity (S) for the sensor with double layer coil and that with single layer coil are 3.5 μV/mT and 2.1 μV/mT, respectively.