Test and Design-for-Testability Solutions for 3D Integrated Circuits

K. Chakrabarty, Mukesh Agrawal, Sergej Deutsch, Brandon Noia, Ran Wang, Fangming Ye
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引用次数: 19

Abstract

Despite the promise and benefits offered by 3D integration, testing remains a major obstacle that hinders its widespread adoption. Test techniques and design-for-testability (DfT) solutions for 3D ICs are now being studied in the research community, and experts in industry have identified a number of hard problems related to the lack of probe access for wafers, test access in stacked dies, yield enhancement, and new defects arising from unique processing steps. We describe a number of testing and DfT challenges, and present some of the solutions being advocated for these challenges. Techniques highlighted in this paper include: (i) pre-bond testing of TSVs and die logic, including probing and non-invasive test using DfT; (ii) post-bond testing and DfT innovations related to the optimization of die wrappers, test scheduling, and access to dies and inter-die interconnects; (iii) interconnect testing in interposer-based 2.5D ICs; (iv) fault diagnosis and TSV repair; (v) cost modeling and test-flow selection.
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3D集成电路的测试和可测试性设计解决方案
尽管3D集成带来了希望和好处,但测试仍然是阻碍其广泛采用的主要障碍。目前,研究团体正在研究3D集成电路的测试技术和可测试性设计(DfT)解决方案,业界专家已经确定了一些难题,这些问题涉及晶圆缺乏探针通道、堆叠式模具中的测试通道、产量提高以及独特加工步骤产生的新缺陷。我们描述了许多测试和DfT挑战,并提出了针对这些挑战的一些解决方案。本文强调的技术包括:(i) tsv和模具逻辑的键合前测试,包括探测和使用DfT的非侵入性测试;(ii)与优化模具包装、测试调度、访问模具和模具间互连相关的键合后测试和DfT创新;(iii)基于介面的2.5D ic互连测试;(四)故障诊断和TSV修复;(v)成本建模和测试流程选择。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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IPSJ Transactions on System LSI Design Methodology
IPSJ Transactions on System LSI Design Methodology Engineering-Electrical and Electronic Engineering
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