Comparison of the ion-optical characteristics of conventional quadrupole probe-forming lenses in the nuclear scanning microprobe system

Abstract

Optimization calculations of the probe-forming systems with three, four and five lenses are carried out. It is shown that the proposed concept of additional power supply of the lenses allows improving the physical parameters of a scanning nuclear microprobe, which can be used in development of the new lithography methods, manufacturing of microwave and nanoelectronics devices.