Characteristics Study of Silicon Nanoparticles Produced by Physical Vapour Deposition

Wafaa M. S. Al-Khayat, G. Wilde
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Abstract

SiliconNanoparticles with thickness ranging between 40 to 50 nm and an average diameter of 80 nm were prepared by Physical Vapour Deposition (electron beam). The Nanoparticles showed blue and visible light emission from 300 A o to 900 A o , with peak intensity at 350-700 A o .Also AFM measurements were carried out and the regularity of silicon Nanoparticles was calculated and found to be equal to 0.3858 according to a quantitative hexagonal regularity calculation.
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物理气相沉积制备纳米硅的特性研究
采用物理气相沉积(电子束)法制备了厚度为40 ~ 50 nm、平均直径为80 nm的硅纳米颗粒。纳米硅在300 ~ 900 μ A范围内发射蓝光和可见光,峰值强度在350 ~ 700 μ A之间。原子力显微镜(AFM)对纳米硅进行了测量,并根据定量六边形正则性计算计算出其正则性为0.3858。
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