Size scaling of printed microstructures using a lift-off printing (LoP) process

Abstract

Inkjet printing has been one of fascinating techniques for microfabrication owing to the characteristics of low manufacturing cost, low processing temperature, low material usage,...etc. [1, 2]. In this work, a Lift-off Printing (LoP) process combining conventional photolithography and inkjet printing processes is introduced to realize printed size-scalable silver microstructures with the line width of 5 up to 70 μm and the resistivity of ~5.7 μΩ · cm on a silicon substrate. In addition, an as-printed interdigitated capacitor with the electrode size and spacing of 10μm has been successfully demonstrated with a capacitance of 2.3 pF/mm2@10kHz.