A compact silicon-based mode converter using bricked subwavelength grating

IF 0.8 4区 物理与天体物理 Q3 PHYSICS, MULTIDISCIPLINARY Acta Physica Sinica Pub Date : 2023-01-01 DOI:10.7498/aps.72.20230673
Lu Meng-jia, Yun Bin-Feng
{"title":"A compact silicon-based mode converter using bricked subwavelength grating","authors":"Lu Meng-jia, Yun Bin-Feng","doi":"10.7498/aps.72.20230673","DOIUrl":null,"url":null,"abstract":"Facing with the increasing capacity requirements of on-chip optical interconnects, mode division multiplexing technology (MDM), which leverages the different spatial eigenmodes at the same wavelength as independent channels to transmit optical signals, has attracted tremendous interest. Mode-order converters that can convert the fundamental mode to high-order modes are key components in MDM systems. However, it is still very challenging to achieve compact mode-order converters with high performances. Subwavelength grating (SWG) can be equivalent to homogenous material, which has the prominent advantages such as control over birefringence, dispersion and anisotropy, enabling photonic devices with high performance. Wheras the conventional SWG only needs single-etch step, but the implementation of SWG structure usually requires a fabrication resolution of the order of 100 nm and below, which is difficult for current wafer-scale fabrication technology. The anisotropic response of SWG can be further engineered by introducing bricked topology structure, providing an additional degree of freedom in the design. Meanwhile, the requirement of fabrication resolution can also be reduced (>100 nm). In this work, we experimentally demonstrate compact TE0-TE1 and TE0-TE2 mode-order converters using bricked subwavelength grating (BSWG) based on silicon-on-insulator (SOI) with the minimum feature size of the BSWG is 145 nm. In the proposed mode-order converter, a quasi-TE0 mode is generated in the BSWG region, which can be regarded as an effective bridge between the two TE modes to be converted. Flexible mode conversion can be realized by only choosing appropriate structural parameters for specific mode transitions between input/output modes and the quasi-TE0 mode. By combing 3D finite difference time domain (FDTD) and particle swarm optimization (PSO) method, TE0-TE1 and TE0-TE2 mode-order converters are optimal designed. It can convert TE0 mode into TE1 and TE2 mode with conversion length of 9.39 μm and 11.27 μm. The simulation results show that the insertion loss of <1 dB and crosstalk of < ‒ 15 dB are achieved for both TE0-TE1 and TE0-TE2 mode-order converters, the corresponding working bandwidth are 128 nm (1511~1639 nm) and 126 nm (1527~1653 nm), respectively. The measurement results indicate that insertion loss and crosstalk are less than 2.5 dB and -10 dB in a bandwidth of 68 nm (1512~1580 nm, limited by the laser tuning range and grating coupler).","PeriodicalId":6995,"journal":{"name":"Acta Physica Sinica","volume":null,"pages":null},"PeriodicalIF":0.8000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Acta Physica Sinica","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.7498/aps.72.20230673","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"PHYSICS, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0

Abstract

Facing with the increasing capacity requirements of on-chip optical interconnects, mode division multiplexing technology (MDM), which leverages the different spatial eigenmodes at the same wavelength as independent channels to transmit optical signals, has attracted tremendous interest. Mode-order converters that can convert the fundamental mode to high-order modes are key components in MDM systems. However, it is still very challenging to achieve compact mode-order converters with high performances. Subwavelength grating (SWG) can be equivalent to homogenous material, which has the prominent advantages such as control over birefringence, dispersion and anisotropy, enabling photonic devices with high performance. Wheras the conventional SWG only needs single-etch step, but the implementation of SWG structure usually requires a fabrication resolution of the order of 100 nm and below, which is difficult for current wafer-scale fabrication technology. The anisotropic response of SWG can be further engineered by introducing bricked topology structure, providing an additional degree of freedom in the design. Meanwhile, the requirement of fabrication resolution can also be reduced (>100 nm). In this work, we experimentally demonstrate compact TE0-TE1 and TE0-TE2 mode-order converters using bricked subwavelength grating (BSWG) based on silicon-on-insulator (SOI) with the minimum feature size of the BSWG is 145 nm. In the proposed mode-order converter, a quasi-TE0 mode is generated in the BSWG region, which can be regarded as an effective bridge between the two TE modes to be converted. Flexible mode conversion can be realized by only choosing appropriate structural parameters for specific mode transitions between input/output modes and the quasi-TE0 mode. By combing 3D finite difference time domain (FDTD) and particle swarm optimization (PSO) method, TE0-TE1 and TE0-TE2 mode-order converters are optimal designed. It can convert TE0 mode into TE1 and TE2 mode with conversion length of 9.39 μm and 11.27 μm. The simulation results show that the insertion loss of <1 dB and crosstalk of < ‒ 15 dB are achieved for both TE0-TE1 and TE0-TE2 mode-order converters, the corresponding working bandwidth are 128 nm (1511~1639 nm) and 126 nm (1527~1653 nm), respectively. The measurement results indicate that insertion loss and crosstalk are less than 2.5 dB and -10 dB in a bandwidth of 68 nm (1512~1580 nm, limited by the laser tuning range and grating coupler).
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
一种采用砖砌亚波长光栅的紧凑硅基模式转换器
面对片上光互连日益增长的容量需求,利用同一波长的不同空间特征模作为独立通道传输光信号的模分复用技术(MDM)引起了人们的极大兴趣。可以将基本模式转换为高阶模式的模式顺序转换器是MDM系统中的关键组件。然而,实现高性能的紧凑型模阶变换器仍然是非常具有挑战性的。亚波长光栅(SWG)可以等效于均质材料,具有控制双折射、色散和各向异性等突出优点,使光子器件具有高性能。而传统的SWG只需要单步蚀刻,但SWG结构的实现通常需要100 nm及以下的制造分辨率,这对于目前的晶圆级制造技术来说是困难的。通过引入砖状拓扑结构,可以进一步设计SWG的各向异性响应,为设计提供额外的自由度。同时,对制造分辨率的要求也可以降低(>100 nm)。在这项工作中,我们实验展示了紧凑的TE0-TE1和TE0-TE2模式阶转换器,使用基于绝缘体上硅(SOI)的砖状亚波长光栅(BSWG), BSWG的最小特征尺寸为145 nm。在模阶转换器中,在BSWG区域产生一个准te0模式,该模式可以看作是两个待转换TE模式之间的有效桥梁。针对输入/输出模式与准te0模式之间的特定模式转换,只需选择合适的结构参数即可实现柔性模式转换。结合三维时域有限差分(FDTD)和粒子群优化(PSO)方法,对TE0-TE1和TE0-TE2模阶变换器进行了优化设计。可将TE0模式转换为TE1和TE2模式,转换长度分别为9.39 μm和11.27 μm。仿真结果表明,TE0-TE1和TE0-TE2模阶转换器的插入损耗<1 dB,串扰< - 15 dB,相应的工作带宽分别为128 nm (1511~1639 nm)和126 nm (1527~1653 nm)。测量结果表明,在68 nm (1512~1580 nm,受激光调谐范围和光栅耦合器的限制)带宽范围内,插入损耗和串扰分别小于2.5 dB和-10 dB。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
Acta Physica Sinica
Acta Physica Sinica 物理-物理:综合
CiteScore
1.70
自引率
30.00%
发文量
31245
审稿时长
1.9 months
期刊介绍: Acta Physica Sinica (Acta Phys. Sin.) is supervised by Chinese Academy of Sciences and sponsored by Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences. Published by Chinese Physical Society and launched in 1933, it is a semimonthly journal with about 40 articles per issue. It publishes original and top quality research papers, rapid communications and reviews in all branches of physics in Chinese. Acta Phys. Sin. enjoys high reputation among Chinese physics journals and plays a key role in bridging China and rest of the world in physics research. Specific areas of interest include: Condensed matter and materials physics; Atomic, molecular, and optical physics; Statistical, nonlinear, and soft matter physics; Plasma physics; Interdisciplinary physics.
期刊最新文献
Simulation method of urban evacuation based on mesoscopic cellular automata Medium Correction to Gravitational Form Factors Research progress of applications of freestanding single crystal oxide thin film Research progress of ultra-high spatiotemporal resolved microscopy High-fidelity single-qubit gates of a strong driven singlet-triplet qubit
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1